Name: SEMI D54 : 2009E
Brand: SEMI

SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD)

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies communication between host and equipment at the transfer points where substrates are transferred into/out of the equipment at FPD fabs.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (07/2009) E = This standard was editorially modified in October 2009 to correct editorial errors. (12/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E41 : 1995	EXCEPTION MANAGEMENT (EM) STANDARD
SEMI E40 : 2013	STANDARD FOR PROCESSING MANAGEMENT
SEMI E90 : 2012(R2018)	SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E39 : 2003(R2014)	OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI E53 : 2004	EVENT REPORTING
SEMI D51 : 2009	SPECIFICATION FOR HANDSHAKE METHOD OF SINGLE SUBSTRATE FOR HANDLING OFF/ON TOOL IN FPD PRODUCTION

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SEMI D54 : 2009E