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SEMI E40 : 2013

SEMI E40 : 2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

STANDARD FOR PROCESSING MANAGEMENT

Superseded date

04-05-2024

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the application of the appropriate processing to specified material received at the processing agent.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E40.1. (08/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E94.1 : 2007 SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM)
SEMI E169 : 2015 GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E134.1 : 2014 SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM)
SEMI E134 : 2014 SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI D54 : 2009E SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD)
SEMI E157 : 2011(R2016) SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
SEMI E40.1 : 2013 SECS-2 SUPPORT FOR PROCESSING MANAGEMENT STANDARD
SEMI E174 : 2017 SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)
SEMI E126 : 2008(R2018) SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP)
SEMI E130 : 2017 SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI E172 : 2018 SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)
SEMI E168 : 2015 SPECIFICATION FOR PRODUCT TIME MEASUREMENT
SEMI E170 : DEC 2017 SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)
SEMI E53.1 : 2004 SECS-2 SUPPORT FOR EVENT REPORTING STANDARD
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI HB4 : 2013 SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)
SEMI E139 : 2013 SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP)
SEMI E171 : FEB 2016 SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)
SEMI E147 : 2007E GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)
SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E127 : 2008 SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)
SEMI E142 : MAR 2006 SPECIFICATION FOR SUBSTRATE MAPPING

SEMI E39.1 : 2003(R2014) SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI E53 : 2004 EVENT REPORTING

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