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SEMI E134.1 : 2014

SEMI E134.1 : 2014

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM)

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies an implementation mapping of the SEMI E134 specification for Data Collection Management to the SOAP 1.2 protocol. Also provides a description of the XML Schema data types used to support the UML classes defined in SEMI E134, and also describes the WSDL port type and binding definitions used to support the operations defined by the interfaces specified in SEMI E134.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Not available separately, Published within the SEMI E134 family of standards. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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