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SEMI E126 : 2008(R2018)

SEMI E126 : 2008(R2018)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP)

Available format(s)

Hardcopy

Superseded date

09-05-2023

Language(s)

English

Published date

07-16-2018

Publisher

Semiconductor Equipment & Materials Institute

Specifies for use by OEMs, users, and third party equipment and process control system suppliers who need to achieve equipment and process control of select process quality parameters, utilizing standardized methods for actuation of process control parameters.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (06/2003) Also available in CD-ROM format. (02/2008)
DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)

View more information
Hardcopy - English

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