SEMI E172 : 2018
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)
Superseded date
10-05-2020
Published date
02-09-2015
Specifies the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.
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