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SEMI E53.1 : 2004

SEMI E53.1 : 2004

Current

Current

The latest, up-to-date edition.

SECS-2 SUPPORT FOR EVENT REPORTING STANDARD

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a general purpose set of event reporting services that may be offered by equipment suppliers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E53. (12/2009) INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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