SEMI E170 : DEC 2017
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)
05-04-2019
08-04-2014
Specifies a standardized 'secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment' which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.
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