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SEMI E40.1 : 2013

SEMI E40.1 : 2013

Current

Current

The latest, up-to-date edition.

SECS-2 SUPPORT FOR PROCESSING MANAGEMENT STANDARD

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps the services and data of SEMI E40 to SECS-II streams and functions and data definitions. And implements the Processing Management, which provides remote control of wafer processing, using the SECS-II message protocol.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2001) Not available separately, Published within the SEMI E40 family of standards. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E174 : 2017 SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)

SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT

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