Name: SEMI E94.1 : 2007
Brand: SEMI

SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM)

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the services and data of SEMI E94 to SECS-II streams and functions and data definitions.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2001) Not available separately, Published within the SEMI E94 family of standards. (02/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E94 : 2014	SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E39.1 : 2003(R2014)	SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E40 : 2013	STANDARD FOR PROCESSING MANAGEMENT
SEMI E53 : 2004	EVENT REPORTING

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SEMI E94.1 : 2007