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SEMI HB4 : 2013

SEMI HB4 : 2013

Current

Current

The latest, up-to-date edition.

SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)

Published date

10-09-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the equipment automation interface for communication and control of process, automation and metrology equipment used in HB-LED manufacturing.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (09/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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