Name: SEMI E139 : 2013
Brand: SEMI

SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP)

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the cooperative interaction between the Factory Information & Control System (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005) Includes SEMI E139.1, SEMI E139.2 & SEMI E139.3. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E30 : 2018	SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
SEMI E169 : 2015	GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E157 : 2011(R2016)	SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E139.2 : 2008	SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP)
SEMI E149 : 2014	GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT