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SEMI E30 : 2018

SEMI E30 : 2018

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)

Superseded date

10-05-2020

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2007) SEMI E30.1 & SEMI E30.5 are no longer published within the SEMI E30 family of standards, Published and sold separately on their own pages. (07/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E23 : 2004(R2010) SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE
SEMI E4 : 1999(R2007) SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)
SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES
SEMI E139 : 2013 SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP)

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