SEMI E139.2 : 2008
Current
Current
The latest, up-to-date edition.
SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP)
Published date
01-12-2013
Provides a mapping of the RaP communication services to the SECS-II protocol. Also provides accurate representation of RaP services as defined in SEMI E139 in SECS-II format.
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