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SEMI D53 : 2008(R2015)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) PELLICLES

Superseded date

06-07-2021

Published date

01-12-2013

Describes standard stand off, transmittance, and strength of pellicle films used for masks.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (06/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI D6 : 2011(R2017) SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES

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