SEMI D6 : 2011(R2017)

Name: SEMI D6 : 2011(R2017)
Brand: SEMI

Superseded

SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES

Superseded date

07-20-2023

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies standard for substrates used to fabricate liquid crystal display masks.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI D6:2023

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SEMI D11 : 1995(R2009)	SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
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SEMI D53 : 2008(R2015)	SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) PELLICLES
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SEMI P1 : 2008E

SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES

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