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SEMI D57 : 2010

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

DEFINITION OF MEASUREMENT INDEX (VCT) FOR MURA IN FPD IMAGE QUALITY INSPECTION

Superseded date

09-05-2023

Published date

01-12-2013

Describes the definition of Measurement Index (VCT) for Mura in FPD Image Quality Inspection.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI D31 : 2018 GUIDE FOR DEFINITION OF MEASUREMENT INDEX (DSEMU) FOR LUMINANCE MURA IN FPD IMAGE QUALITY INSPECTION

SEMI D41 : 2005 MEASUREMENT METHOD OF SEMI MURA IN FPD IMAGE QUALITY INSPECTION

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