Name: SEMI E1 : NOV 2010(R2016)
Brand: SEMI

SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 inch, 100 mm, 125 mm and 150 mm diameter wafers. Also includes some related information on, but not a specification for, 200 mm diameter wafer carriers.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) SEMI E1-9 is no longer published within the SEMI E1 family of standards. It is published and sold separately on its own page. (09/2002)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E1 : NOV 2010(R2016)

SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS

Abstract

General Product Information

Standards Referenced By This Book

Category

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