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SEMI E22 : 2015

SEMI E22 : 2015

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E22.1. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E22.1 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME

SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E1 : NOV 2010(R2016) SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS
SEMI E21 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT

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