SEMI E140 : 2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR GAS DELIVERY SYSTEMS
11-09-2018
01-12-2013
Gives standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of gas delivery systems in the semiconductor and related industries.
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