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SEMI E62 : NOV 2006(R2012)

SEMI E62 : NOV 2006(R2012)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the tool side of the interface between a process or metrology tool and a front-opening box. Also intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchange-ability at all mechanical interfaces.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (11/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E99 : 2017 SPECIFICATION FOR CARRIER ID READER/WRITER
SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
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01/121101 DC : DRAFT MAR 2001 BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS)
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SEMI E15-1 : 2005(R2010) SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
SEMI E171 : FEB 2016 SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)
SEMI S28 : 2011 SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E103 : 2004 MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP
DIN EN ISO 14644-7:2005-01 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004); German version EN ISO 14644-7:2004

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SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
SEMI M31 : 2008 MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS

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