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SEMI E118 : NOV 2004E

SEMI E118 : NOV 2004E

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller. A standard interface will increase interchangeability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2002) E = Editorially modified to correct errors in Figure R2-1. (03/2006) Includes SEMI E118.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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