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SEMI E75 : 1998

SEMI E75 : 1998

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

PROVISIONAL MECHANICAL SPECIFICATION FOR BOX/POD COMPATIBLE CASSETTES USED TO TRANSPORT AND STORE 300-MM WAFERS

Withdrawn date

03-01-2001

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the box/pod compatible cassettes that are used in transporting/storing 300-mm wafers in an IC manufacturing facility. Covering both manual and auto-transport use, including high speed extraction of wafers in processing equipment. It sets a level of specification that places minimal limits on innovation whilst ensuring inter-changeability and modularity at all mechanical interfaces.

DevelopmentNote
This standard is provisional because of concerns regarding the kinematic coupling pins causing excessive wear on carriers, the pitch being too small, and the usefulness of the robotic handling flanges, fork-lift slots, covering rails & side grip pits. Once cassette testing is done, this standard should be modified and upgraded from provisional status. Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

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