Name: SEMI G81 : 2007(R2015)
Brand: SEMI

SPECIFICATION FOR MAP DATA ITEMS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the data items that relate to electronic substrate mapping.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI G81.1 (05/2015)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI G81 : 2007(R2015)