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SEMI HB8 : 2017

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR DETERMINING ORIENTATION OF A SAPPHIRE SINGLE CRYSTAL

Published date

05-10-2017

Describes a test method for sapphire single crystal orientation measurement which includes sapphire cylinder, sapphire ingot, sapphire wafer, etc.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY
SEMI MF847 : 2016 TEST METHOD FOR MEASURING CRYSTALLOGRAPHIC ORIENTATION OF FLATS ON SINGLE CRYSTAL SILICON WAFERS BY X-RAY TECHNIQUES

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