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SEMI M21 : 2018

SEMI M21 : 2018

Current

Current

The latest, up-to-date edition.

GUIDE FOR ASSIGNING ADDRESSES TO RECTANGULAR ELEMENTS IN A CARTESIAN ARRAY

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies an element addressing convention for locating and uniquely identifying rectangular elements in a Cartesian array.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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