SEMI M66 : 2010(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD TO EXTRACT EFFECTIVE WORK FUNCTION IN OXIDE AND HIGH-K GATE STACKS USING THE MIS FLAT BAND VOLTAGE-INSULATOR THICKNESS TECHNIQUE
Superseded date
12-06-2021
Published date
01-12-2013
Specifies determination of the effective work function of both oxide and high-K gate stacks.
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