SEMI M84 : 2014E

Provides ordering information and certain requirements for high-purity, single crystal polished silicon wafers used for gallium nitride-on-silicon applications. Specifications for dimensional characteristics and selected other properties are provided for three types of single crystal polished silicon wafers: - 150 mm flatted polished single crystal silicon wafers with secondary flat, - 150 mm flatted polished single crystal silicon wafers without secondary flat, and - 200 mm notched polished single crystal silicon wafers.