SEMI MF1388 : 2007(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR GENERATION LIFETIME AND GENERATION VELOCITY OF SILICON MATERIAL BY CAPACITANCE-TIME MEASUREMENTS OF METAL-OXIDE-SILICON (MOS) CAPACITORS
11-16-2023
08-04-2018
Covers the measurement of generation lifetime and generation velocity of silicon wafers. Also applies to semiconductor materials other than silicon and to insulators other than silicon dioxide, but the details of capacitor fabrication and the analyses and interpretation of data in such cases are not given in this test method.
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