SEMI MF1618 : 2010(R2015)
Current
Current
The latest, up-to-date edition.
PRACTICE FOR DETERMINATION OF UNIFORMITY OF THIN FILMS ON SILICON WAFERS
Published date
01-12-2013
Specifies a set of site distribution patterns for measuring the uniformity of a property of a thin film on a silicon wafer, as well as simple procedures for analyzing and reporting the results of those measurements.
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