Name: SEMI MF2166 : 2010
Brand: SEMI

PRACTICES FOR MONITORING NON-CONTACT DIELECTRIC CHARACTERIZATION SYSTEMS THROUGH USE OF SPECIAL REFERENCE WAFERS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies procedures for testing these systems with the use of special reference wafers with specified characteristics. The procedures in these practices are designed to ensure that the NCDCS being evaluated provides reliable data for selected device-related parameters.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2004)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI MF2166 : 2010

PRACTICES FOR MONITORING NON-CONTACT DIELECTRIC CHARACTERIZATION SYSTEMS THROUGH USE OF SPECIAL REFERENCE WAFERS

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