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SEMI MS7 : 2008

SEMI MS7 : 2008

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR MICROFLUIDIC INTERFACES TO ELECTRONIC DEVICE PACKAGES

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes an industry-standard for fluidic interfaces with electronic devices. Also describes the connection attributes and specifies the interface dimensions required to design and build devices and systems that are compliant with this standard.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (06/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI MS9 : 2011 SPECIFICATION FOR HIGH DENSITY PERMANENT CONNECTIONS BETWEEN MICROFLUIDIC DEVICES

SEMI MS6 : 2008 GUIDE FOR DESIGN AND MATERIALS FOR INTERFACING MICROFLUIDIC SYSTEMS

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