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SEMI MS8 : 2009(R2015)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

GUIDE TO EVALUATING HERMETICITY OF MICROELECTROMECHANICAL SYSTEMS (MEMS) PACKAGES

Superseded date

07-04-2022

Published date

01-12-2013

Gives an overview of hermetic packaging with emphasis on the evaluation of hermeticity of the smaller internal volumes typical of MEMS.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI MS9 : 2011 SPECIFICATION FOR HIGH DENSITY PERMANENT CONNECTIONS BETWEEN MICROFLUIDIC DEVICES

SEMI MS3 : 2015 TERMINOLOGY FOR MEMS TECHNOLOGY

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