SEMI S23 : 2016

Name: SEMI S23 : 2016
Brand: SEMI

Superseded

GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT

Superseded date

12-11-2021

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI S23:2021

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