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SEMI T7:2016(R2022)

Current

Current

The latest, up-to-date edition.

Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol

Available format(s)

Hardcopy

Language(s)

English

Published date

04-01-2022

This Specification is intended to provide a marking symbology that can be used to mark silicon wafers with minimal intrusion into the fixed quality area of the wafer.

DocumentType
Revision
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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US$150.00
Excluding Tax where applicable

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