11/30231583 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS EN 62047-17 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 17: BULGE TEST METHOD FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS
Hardcopy , PDF
31-07-2015
English
FOREWORD
1 Scope
2 Normative References
3 Terms, definitions and symbols
4 Principle of bulge test
5 Test method
6 Test piece
7 Test procedure and analysis
8 Test report
Annex A (informative) - Data analysis
Annex B (informative) - Example of test piece
fabrication: MEMS process
Annex C (Informative) - Deformation measurement
techniques
Bibliography
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