ASTM F 1621 : 1996
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Practice for Determining the Positional Accuracy Capabilities of a Scanning Surface Inspection System (Withdrawn 2003)
Hardcopy , PDF
05-11-2013
English
31-12-2010
CONTAINED IN VOL. 10.05, 2001 Determines the accuracy with which a scanning surface inspection system (SSIS) reports the positions of localized light scatterers on a silicon wafer surface. Includes procedures to separate the influences of wafer handling and wafer orientation on the precision and bias of the positions reported.
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