Vacuum technology. Valves. Leak test

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-01-2010

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Requirements
6 Test methods
7 Test report
Bibliography

Describes methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.

This International Standard specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system. It is applicable to vacuum valves that can be closed to leak rates less than 1×10⁻⁵ Pa m³/s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in this International Standard. The methods are suitable for the verification of valve specifications.

A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.

NOTE1 The data for large valves and valves without a valve body can vary from those obtained during delivery inspection depending on the accuracy of the attachment surface of the vacuum device.

NOTE2 The data obtained from this procedure is based on the testing conducted on an individual unit of a vacuum valve and they can be different from those obtained during delivery inspection if the test is performed with the valve incorporated into the equipment.

Committee	MCE/8/-/4
DevelopmentNote	Supersedes 08/30176520 DC. (01/2010)
DocumentType	Standard
Pages	22
PublisherName	British Standards Institution
Status	Current
Supersedes	08/30176520 DC : 0

Standards	Relationship
ISO 27895:2009	Identical

ASTM E 1603 : 1999	Standard Test Methods for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
ISO 3530:1979	Vacuum technology — Mass-spectrometer-type leak-detector calibration

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BS ISO 27895:2009

Vacuum technology. Valves. Leak test

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Standards Referencing This Book

Category

Subcategory