Vacuum technology Valves Leak test

Available format(s)

Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

30-11-2009

Publisher

International Organization for Standardization

ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10^-⁵ Pa m³/s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications.

A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.

DevelopmentNote	Supersedes ISO/DIS 27895. (12/2009)
DocumentType	Standard
Pages	11
PublisherName	International Organization for Standardization
Status	Current

Standards	Relationship
UNI ISO 27895:2020	Identical
BS ISO 27895:2009	Identical
GOST R ISO 27895 : 2013	Identical
NEN ISO 27895 : 2009	Identical

ASTM E 1603 : 1999	Standard Test Methods for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
ISO 3530:1979	Vacuum technology — Mass-spectrometer-type leak-detector calibration