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SEMI C58 : 2016

SEMI C58 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR HYDROGEN

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a series of specifications for different grades of hydrogen (H[2]) that are used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C3.30 and SEMI C3.19. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI MF1727 : 2010(R2015) PRACTICE FOR DETECTION OF OXIDATION INDUCED DEFECTS IN POLISHED SILICON WAFERS
SEMI M51 : 2012 TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY

SEMI C3 : 2017 SPECIFICATIONS FOR GASES
SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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