Name: SEMI C3 : 2017
Brand: SEMI

SPECIFICATIONS FOR GASES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes and includes SEMI C3.38. (02/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI C3.38 : 1989

SEMI C60 : 2017	SPECIFICATION FOR NITROUS OXIDE
SEMI C58 : 2016	SPECIFICATION FOR HYDROGEN
SEMI C3.31 : 2002	PROVISIONAL STANDARD FOR DICHLOROSILANE (H2SICI2) IN CYLINDERS, 99% QUALITY
SEMI C3.20 : 2014(R2019)	SPECIFICATION FOR HELIUM (HE), IN CYLINDERS, 99.9995%
ASTM F 1723 : 1996	Standard Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy
SEMI F51 : 2017	GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY
SEMI C71 : 2015	SPECIFICATION AND GUIDE FOR BORON TRICHLORIDE (BCI[3])
SEMI C59 : 2017	SPECIFICATION FOR NITROGEN
SEMI C3-2 : 2011(R2018)	SPECIFICATION FOR ARSINE (ASH[3]) IN CYLINDERS, 99.94% QUALITY
SEMI C3.34 : 2016	SPECIFICATION FOR DISILANE (SI[2]H[6]) IN CYLINDERS, 97% QUALITY
SEMI C3.27 : 2002(R2018)	SPECIFICATION FOR BORON TRIFLUORIDE (BF[3]) IN CYLINDERS, 99.0% QUALITY
SEMI C3.59 : 2002	SPECIFICATIONS AND GUIDELINES FOR NITROGEN
SEMI C3.12 : 2016	SPECIFICATION FOR AMMONIA (NH[3]) IN CYLINDERS, 99.998% QUALITY
SEMI C54 : 2016	SPECIFICATION FOR OXYGEN
SEMI C70 : 2016	SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE
SEMI C3-6 : 2010(R2015)	SPECIFICATION FOR PHOSPHINE (PH3) IN CYLINDERS, 99.98% QUALITY
SEMI C56 : 2016	SPECIFICATION FOR DICHLOROSILANE
SEMI C3 PT2 : DUPLICATE RECORD	DUPLICATE RECORD
SEMI C57 : 2017	SPECIFICATION FOR ARGON

Sorry this product is not available in your region.

Access your standards online with a subscription

Features

SEMI C3 : 2017