SEMI D12 : 1995(R2003)

Specifies various aspects of the edges of a flat panel display substrate and describes their relationships. Assuming the existence of terminology described in other SEMI flat panel display documents. Applicable to substrates where the nominal thickness specification is 1.1 mm. The edges of a flat panel display substrate are important in both the specifications for and uses of the material. Effecting the means for making, handling, storing and processing substrates. Specifying the terminology and the geometric properties of these edges will help both the producers and users of substrates and processing/inspection equipment.