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SEMI D5 : 1994(R2003)

SEMI D5 : 1994(R2003)

Current

Current

The latest, up-to-date edition.

STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate which apply to substrates mainly used in fabrication AMLCD displays. May also apply to substrates for other display types. The edge lengths specified range from 300 x 300 mm to 500 x 500 mm. A single thickness, 1.1 mm, applies to all substrates.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES
SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI D16 : 1998 SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT
SEMI D10 : 1995(R2003) TEST METHOD FOR CHEMICAL DURABILITY OF FLAT PANEL DISPLAY GLASS SUBSTRATES
SEMI D11 : 1995(R2009) SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
SEMI D18 : 1999E SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES

SEMI D4 : 1994 METHOD FOR REFERENCING FLAT PANEL DISPLAY SUBSTRATES
SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D12 : 1995(R2003) SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES

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