Name: SEMI D16 : 1998
Brand: SEMI

SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. Also describes mechanical features on or about the process tool port, and in front of or on the tool face.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI D5 : 1994(R2003)	STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D11 : 1995(R2009)	SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES

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SEMI D16 : 1998

SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT

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