SEMI E54.16 : 2006
Current
The latest, up-to-date edition.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS
12-01-2013
Sets a communication specification based on the ANSI/EIA/CEA-709.1 Control Networking Protocol (LonWorks) to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on semiconductor manufacturing equipment.
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