SEMI E54.6 : 1997
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
STANDARD FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS
01-07-2005
12-01-2013
Describes a communication specification based on the LonWorks technology specification to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.
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