SEMI E92 : 2002E(R2015)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)
23-06-2023
12-01-2013
Specifies standard specifications such as interfaces between the component that opens the boxes and presents the boxes to the equipment wafer handler for unloading and loading 300 mm wafers (BOLTS/Light unit) and higher level part of equipment and its functions to provide.
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