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SEMI S28 : 2011

SEMI S28 : 2011

Current

Current

The latest, up-to-date edition.

SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a set of performance and design based safety considerations for load ports and wafer handling robots that are intended to be integrated into semiconductor manufacturing equipment (SME).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2011)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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