SEMI F105 : SEP 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GUIDE FOR METALLIC MATERIAL COMPATIBILITY IN GAS DISTRIBUTION SYSTEMS
19-10-2022
12-01-2013
Pertains to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment.
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