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SEMI F20 : 2006E(R2017)

SEMI F20 : 2006E(R2017)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the metallurgical cleanliness requirements and material composition of 316L stainless steel required for use in the manufacture of components for general purpose, high purity, and ultra-high purity chemical (gas or liquid) distribution systems.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (07/2006) E = Editorially modified to correct a section numbering error. (03/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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