SEMI F88 : 2012
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF STANDARD SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
12-01-2013
Sets up the properties and physical dimensions of mass flow controllers and mass flow meters for 1.5 inch type surface mount gas distribution systems. Also pertains to standard size mass flow controllers and mass flow meters.
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